介紹了壓電射流角速度傳感器的軟件補償技術，給出了壓電射流角速度傳感器的溫度補償和線性補償的原理和程序。通過合理選擇單片機，利用數據插值和查表相結合的方法，實現了傳感器的溫度補償和線性補償，實驗結果表明，經過軟件補償后傳感器的非線性度從2%減低到0.5%，工作溫度范圍從0～45℃拓寬到－40～+55℃。此種補償方法，簡單易行，對于其他類型的傳感器，只要其重復精度足夠高，該技術具有普遍意義。
關鍵詞:壓電射流角速度傳感器；熱電阻絲；溫度補償；線性補償
Abstract: The compensation technology for the piezoelectric fluidic angular sensors is discussed, including the principle and program of temperature compensation and linearity compensation. The temperature compensation and linearity compensation of sensor have been realized by means of adopting proper microprocessors, interpolation and table-searching. The numerical results show that the nonlinearity decreases from 2% to 0.5% and the range of operation temperature increases from 0 ~ 45℃ to –40 ~+55℃ when the sensors compensated. The compensation technology is easy to apply and also available for the sensors of other kinds once the repeatable accuracy is high enough.
Key words: piezoelectric fluidic angular rate sensors；hot wire; temperature compensation；linearity compensation