微細電解線切割加工模型分析與試驗研究

摘要：微細電解線切割加工是一種微細加工新方法。由于原理上陰極不會損耗，采用微米級直徑的電極絲，可加工出微米至數十微米尺度的復雜微結構件。基于電化學原理，討論了微細電解線切割加工的機理，建立了加工的理論模型，得出了微米尺度線電極進給速度的理論上限。通過電解線切割加工試驗，分析了各種加工參數對加工精度的影響規律，并加工出縫寬為20μm左右的微型槳葉結構。試驗結果表明，微細電解線切割加工技術能為特殊性能材料的微細加工提供有效的新途徑。

關鍵詞：微細電解線切割加工；線電極；理論模型；試驗研究

THEORETICAL MODEL AND EXPERIMENTS OF WIRE
ELECTROCHEMICAL MICRO-MACHINING
WANG Kun1,?? ZHU Di2
?(1. College of Mechanical Engineering, Tongji University, Shanghai 200092, China;
2. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)

Abstract: Wire electrochemical micro-machining (WEMM) is proposed as a new method of precision machining in this paper. Because of no electrode wear in this process the micrometer scale metal wire can be used as the wire electrode in WEMM, and the micrometer or tens micrometer structure can be fabricated. Base on the principle of electrochemical, the mechanism of wire electrochemical micro-machining is investigated, the theoretical model of the method is founded and the top limit of feed speed of the micron scale wire electrode is studied. Effects of process parameters on the machining accuracy in the electrochemical micro-machining have been studied theoretically and experimentally, and micro blades with the slit width of 20μm is machined. It is proved experimentally that WEMM can provide a new effective manufacturing method for machining high-performance materials.
Key words: wire electrochemical micro-machining; Wire electrode; Theoretical model；Experimental research